Beyond Resolution: Recent Progress and Industrial Challenges of Nanoimprint Lithography for Advanced Semiconductor Manufacturing. X-Disciplinarity, [S. l.], v. 2, n. 3, p. 4, 2026. DOI: 10.63174/xdi.NZLB4235. Disponível em: https://instipub.com/xdi/article/view/108. Acesso em: 27 jul. 2026.